| Publication Type |
Journal Article |
| School or College |
College of Science |
| Department |
Physics |
| Creator |
Williams, Clayton C. |
| Other Author |
Hough, W. P.; Rishton, S. A. |
| Title |
Scanning capacitance microscopy on a 25 nm scale |
| Date |
1989 |
| Description |
A near-field capacitance microscope has been demonstrated on a 25 nm scale. A resonant circuit provides the means for sensing the capacitance variations between a sub-lGO-nra tip and surface with a sensitivity of 1X 10 19 F in a I kHz bandwidth. Feedback control is used to scan the tip at constant gap across a sample, providing a means of noncontact surface profiling. Images of conducting and nonconducting structures are presented. |
| Type |
Text |
| Publisher |
American Institute of Physics (AIP) |
| Journal Title |
Applied Physics Letters |
| Volume |
55 |
| Issue |
2 |
| First Page |
203 |
| Last Page |
205 |
| DOI |
10.1063/1.102096 |
| citatation_issn |
36951 |
| Subject |
Scanning capacitance microscopy |
| Subject LCSH |
Scanning electron microscopy |
| Language |
eng |
| Bibliographic Citation |
Williams, C. C., Hough, W. P., & Rishton, S. A. (1989). Scanning capacitance microscopy on a 25 nm scale. Applied Physics Letters, 55(2), July, 203-5. |
| Rights Management |
(c)American Institute of Physics. The following article appeared in Williams, C. C., Hough, W. P., & Rishton, S. A., Applied Physics Letters, 55(2), 1989 and may be found at http://dx.doi.org/10.1063/1.102096 |
| Format Medium |
application/pdf |
| Format Extent |
653,385 bytes |
| Identifier |
ir-main,8583 |
| ARK |
ark:/87278/s6sj2411 |
| Setname |
ir_uspace |
| ID |
705297 |
| Reference URL |
https://collections.lib.utah.edu/ark:/87278/s6sj2411 |
