Publication Type |
Journal Article |
School or College |
College of Engineering |
Department |
Materials Science & Engineering |
Creator |
Liu, Feng |
Other Author |
Zielasek, V.; Zhao, Yuegang; Maxson, J. B.; Lagally, M. G. |
Title |
Surface stress-induced island shape transition in Si(001) homoepitaxy |
Date |
2001-11 |
Description |
A low-energy electron microscopy study of two-dimensional Si(001) island shapes near thermal equilibrium on 10315 mm2 large single-domain terraces reveals a continuous increase of island aspect ratio and a shape transition from elliptical to ‘‘American-football''-like with increasing island size. The size-dependent island shapes are driven by elastic relaxation caused by the intrinsic surface stress anisotropy present on Si(001). Analysis of the measured elliptical island shapes based on an elastic-model calculation allows a quantitative determination of step energies and of the surface stress anisotropy as a function of temperature. |
Type |
Text |
Publisher |
American Physical Society |
Journal Title |
Physical Review B |
Volume |
64 |
Issue |
20 |
DOI |
10.1103/PhysRevB.64.201320 |
citatation_issn |
0163-1829 |
Subject |
Si(001); Homoepitaxy; Island shape transition; Single-domain terraces |
Subject LCSH |
Strain theory (Chemistry); Surface chemistry; Epitaxy |
Language |
eng |
Bibliographic Citation |
Zielasek, V., Liu, F., Zhao, Y., Maxson, J. B., & Lagally, M. G. (2001). Surface stress-induced island shape transition in Si(001) homoepitaxy. Physical Review B, 64(20), 201320(R). |
Rights Management |
(c) American Physical Society http://dx.doi.org/10.1103/PhysRevB.64.201320 |
Format Medium |
application/pdf |
Format Extent |
207,745 bytes |
Identifier |
ir-main,12187 |
ARK |
ark:/87278/s6k652gv |
Setname |
ir_uspace |
ID |
705057 |
Reference URL |
https://collections.lib.utah.edu/ark:/87278/s6k652gv |