Direct comparison of cross-sectional scanning capacitance microscope dopant profile and vertical secondary ion-mass spectroscopy profile

Update Item Information
Publication Type Journal Article
School or College College of Science
Department Physics
Creator Williams, Clayton C.; Huang, Yufeng
Other Author Smith, H.
Title Direct comparison of cross-sectional scanning capacitance microscope dopant profile and vertical secondary ion-mass spectroscopy profile
Date 1996-01
Description The scanning capacitance microscope (SCM) has been shown to be useful for quantitative 2D dopant profiling near the surface of silicon. An atomic force microscope is used to position a nanometer scale tip at a silicon surface, and local capacitance change is measured as a function of sample bias. A new feedback method has been recently demonstrated in which the magnitude of the ac bias voltage applied to the sample is adjusted to maintain a constant capacitance change as the tip is scanned across the sample surface.
Type Text
Publisher American Institute of Physics (AIP)
Journal Title Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Volume 14
Issue 1
First Page 433
Last Page 436
DOI 10.1116/1.588489
citatation_issn 0734211X
Subject Oxide capacitance; Dopant profile; Oxide layer; Scanning capacitance microscopy
Subject LCSH Semiconductor doping; Semiconductor wafers; Scanning electron microscopy; Metal-insulator transitions
Language eng
Bibliographic Citation Huang, Y., Williams, C. C., & Smith, H. (1996). Direct comparison of cross-sectional scanning capacitance microscope dopant profile and vertical secondary ion-mass spectroscopy profile. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 14(1), 433-6.
Rights Management (c)American Institute of Physics. The following article appeared in Huang, Y., Williams, C. C., & Smith, H., Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 14(1), 1996 and may be found at http://dx.doi.org/10.1116/1.588489
Format Medium application/pdf
Format Extent 73,509 bytes
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Reference URL https://collections.lib.utah.edu/ark:/87278/s6h13kk9