Publication Type |
Journal Article |
School or College |
College of Science |
Department |
Physics |
Creator |
Williams, Clayton C. |
Other Author |
Bussmann, E. |
Title |
Sub-10 nm lateral spatial resolution in scanning capacitance microscopy achieved with solid platinum probes |
Date |
2004 |
Description |
Sub-10 nm resolution can be obtained in scanning capacitance microscopy (SCM) if the probe tip is approximately of the same size. Such resolution is observed, although infrequently, with present commercially available probes. To acquire routine sub-10 nm resolution, a solid Pt metal probe has been developed with a sub-10 nm tip radius. The probe is demonstrated by SCM imaging on a cross-sectioned 70 nm gatelength field-effect transistor (FET), a shallow implant (n+/p, 24 nm junction depth), and an epitaxial staircase (p, ;75 nm steps). |
Type |
Text |
Publisher |
American Institute of Physics (AIP) |
Journal Title |
Review of Scientific Instruments |
Volume |
75 |
Issue |
2 |
First Page |
422 |
Last Page |
425 |
DOI |
10.1063/1.1641161 |
citatation_issn |
346748 |
Language |
eng |
Bibliographic Citation |
Bussmann, E., & Williams, C. C. (2004). Sub-10 nm lateral spatial resolution in scanning capacitance microscopy achieved with solid platinum probes. Review of Scientific Instruments, 75(2), Feb., 422-25. |
Rights Management |
(c)American Institute of Physics. The following article by Bussmann, E., & Williams, C. C. appeared in Jouranl of Review of Scientific Instruments, 75(2), 2004 and may be found at http://www.DOI: 10.1063/1.1641161. |
Format Medium |
application/pdf |
Format Extent |
128,575 bytes |
Identifier |
ir-main,5149 |
ARK |
ark:/87278/s69w104f |
Setname |
ir_uspace |
ID |
706937 |
Reference URL |
https://collections.lib.utah.edu/ark:/87278/s69w104f |