Publication Type |
Journal Article |
School or College |
College of Science |
Department |
Physics |
Creator |
Dawson, Kyle |
Other Author |
Holland, S. E.; Bebek, C. J.; Daniels, P. J.; Emes, J. H.; Groom. D. E.; Jelinsky, S. R.; Karcher, A.; Kolbe, W. F.; Palaio, N. P.; Tran, C. H.; Roe, N. A.; Wang, G., |
Title |
Technology development for 4k x 4k, back-illuminated, fully depleted scientific CCD imagers |
Date |
2007-10 |
Description |
We have developed scientific charge-coupled devices (CCDs) that are fabricated on high-resistivity, n-type silicon substrates, and have demonstrated fully depleted operation for substrate thicknesses of 200-675 μm with formats as large as 2048 × 4096 (15 μm pixels) and 3512 × 3512 (10.5 μm pixels). The main application area for these devices is space and ground-based astronomy, and the CCDs are operated at cryogenic temperatures with slow-scan readout for good performance in terms of dark current and noise. In this work we describe the technology development efforts needed to realize a 4k × 4k (15 μm pixel) CCD with a die area of (64 mm)2. In particular, we describe improved gettering techniques for low dark current and high charge transfer efficiency that have been developed in order to improve fabrication yields for these very large format CCDs. |
Type |
Text |
Publisher |
Institute of Electrical and Electronics Engineers (IEEE) |
First Page |
2220 |
Last Page |
2225 |
DOI |
10.1109/NSSMIC.2007.4436592 |
Subject |
Gettering |
Subject LCSH |
Charge coupled devices; Astronomical observatories; Semiconductor doping |
Language |
eng |
Conference Title |
2007 IEEE Nuclear Science Symposium Conference Record; ; Honolulu, HI, USA |
Bibliographic Citation |
Holland, S. E., Bebek, C. J., Daniels, P. J., Dawson, K., Emes, J. H., Groom. D. E., Jelinsky, S. R., Karcher, A., Kolbe, W. F., Palaio, N. P., Tran, C. H., Roe, N. A., & Wang, G. (2007). Technology development for 4k x 4k, back-illuminated, fully depleted scientific CCD imagers. IEEE Nuclear Science Symposium Conference Record, Honolulu, N47-2, 2220-5. |
Rights Management |
(c) 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. http://dx.doi.org/10.1109/NSSMIC.2007.4436592 |
Format Medium |
application/pdf |
Format Extent |
604,672 bytes |
Identifier |
ir-main,12036 |
ARK |
ark:/87278/s60p1hpz |
Setname |
ir_uspace |
ID |
707100 |
Reference URL |
https://collections.lib.utah.edu/ark:/87278/s60p1hpz |