Creator | Title | Description | Subject | Date | ||
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![]() | Williams, Clayton C. | Scanning capacitance microscope methodology for quantitative analysis of P-N junctions | Quantification of dopant profiles in two dimensions (2D) for p-n junctions has proven to be a challenging problem. The scanning capacitance microscope (SCM) capability for p-n junction imaging has only been qualitatively demonstrated. No well-established physical model exists yet for the SCM data in... | p-n junctions; Scanning capacitance microscope; SCM | 1999 |