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1 Williams, Clayton C.Scanning capacitance microscope methodology for quantitative analysis of P-N junctionsQuantification of dopant profiles in two dimensions (2D) for p-n junctions has proven to be a challenging problem. The scanning capacitance microscope (SCM) capability for p-n junction imaging has only been qualitatively demonstrated. No well-established physical model exists yet for the SCM data in...p-n junctions; Scanning capacitance microscope; SCM1999
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