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CreatorTitleDescriptionSubjectDate
1Scarpulla, MichaelNew methodologies for measuring film thickness, coverage, and topographyWe describe how the techniques of X-ray reflectivity (XRR), electron spectroscopy for chemical analysis (ESCA), and atomic force microscopy (AFM) can be used to obtain the structural parameters-thickness, coverage, and topography-of thin films used on magnetic recording disks. We focus on ultra-thi...Atomic force microscopy; Electron spectroscopy for chemical analysis; X-ray reflectivity2000-01
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