UScholar Works
 
Filters: Format: "application/pdf" Journal Title: "Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures" School Or College: "College of Science"
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TitleDateType
1 Direct comparison of cross-sectional scanning capacitance microscope dopant profile and vertical secondary ion-mass spectroscopy profile1996-01Text
2 Direct imaging of SiO2 thickness variation on Si using modified atomic force microscope1996-03-01Text
3 Two-dimensional scanning capacitance microscopy measurements of cross-sectioned very large scale integration test structures1996-01Text
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