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Filters: Format Medium: "application/pdf" Subject: "Scanning capacitance microscopy"
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TitleDateType
1 Depth dependent carrier density profile by scanning capacitance microscopy1997Text
2 Depth dependent carrier density profile by scanning capacitance microscopy1997Text
3 Direct comparison of cross-sectional scanning capacitance microscope dopant profile and vertical secondary ion-mass spectroscopy profile1996-01Text
4 Lateral dopant profiling in MOS structures on a 100 nm scale using scanning capacitance microscopy1990Text
5 Lateral dopant profiling with 200 nm resolution by scanning capacitance microscopy1989Text
6 Quantitative two-dimensional dopant profile measurement and inverse modeling by scanning capacitance microscopy1995Text
7 Scanning capacitance microscopy on a 25 nm scale1989Text
8 Two step dopant diffusion study performed in two dimensions by scanning capacitance microscopy and TSUPREM IV1998Text
9 Two-dimensional scanning capacitance microscopy measurements of cross-sectioned very large scale integration test structures1996-01Text
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