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2002
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2002
2003
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"Diffusion barriers"
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Title
Date
Type
1
Copper diffusion characteristics in single crystal and polycrystalline TaN
2003
Text
2
Copper diffusion characteristics in single-crystal and polycrystalline TaN
2002
Text
3
Epitaxial growth of TaN films on Si(100) and Si(111) using a TiN buffer layer
2002
Text
4
Growth and characterization of TaN/TiN superlattice structures
2003
Text
5
Self-aligned passivated copper interconnects: a novel technique for making interconnections in ultra large scale integration device applications
2002
Text
6
Single crystal TaN thin films on TiN/Si heterostructure
2002
Text
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