UScholar Works
 
Filters: Format Medium: "application/pdf" Collection: "ir_uspace" Subject: "Carrier density"
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1 Williams, Clayton C.Depth dependent carrier density profile by scanning capacitance microscopyThe depth dependent carrier density was measured on an arsenic implanted silicon sample using scanning capacitance microscopy (SCM). The capacitance versus voltage scan was performed by applying dc biases with a dither ac signal. A strong dc bias dependence was observed at the interface of an abru...Carrier density; Silicon submicrometer technology; Scanning capacitance microscopy1997
2 Williams, Clayton C.Depth dependent carrier density profile by scanning capacitance microscopyThe depth dependent carrier density was measured on an arsenic implanted silicon sample using scanning capacitance microscopy (SCM). The capacitance versus voltage scan was performed by applying dc biases with a dither ac signal. A strong dc bias dependence was observed at the interface of an abru...Carrier density; Silicon submicrometer technology; Scanning capacitance microscopy1997
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