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Filters: Department: "Electrical & Computer Engineering" Journal Title: "Review of Scientific Instruments" Collection: ir_uspace
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| Creator | Title | Description | Subject | Date | ||
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| 1 |
 | Rieth, Loren W; Solzbacher, Florian | High speed wafer scale bulge testing for the determination of thin film mechanical properties | A wafer scale bulge testing system has been constructed to study the mechanical properties of thin films and microstructures. The custom built test stage was coupled with a pressure regulation system and optical profilometer which gives high accuracy three-dimensional topographic images collected on... | 2010 |
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