Creator | Title | Description | Subject | Date | ||
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![]() | Christensen, Douglas A. | Plasma-etched polymer waveguides for intrachip optical interconnects | Optical intrachip communication offers the potential advantages of high speed and lack of electrical interference. We report on progress made on an interconnect design using GaAs LEDs, polymer waveguides, and photodiodes in a silicon substrate. The polymer waveguides are fabricated in polyimide or p... | Polymer waveguides; Intrachip interconnects; LEDs | 1998 |