Creator | Title | Description | Subject | Date | ||
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Stringfellow, Gerald B. | Thermodynamic aspects of organometallic VPE | Organometallic vapor phase epitaxy (OMVPE) is a new crystal growth technique which is rapidly gaining popularity due to its simplicity, flexibility and proven ability to grow excellent quality III/V compounds and alloys for device applications. | Organometallic vapor phase epitaxy; Thermodynamics | 1982 |
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Stringfellow, Gerald B. | Vapor phase interaction of trimethylaluminum with graphite during OMVPE | We have used a molecular beam mass spectrometer to study the interaction of trimethylaluminum (TMA) with graphite surfaces. Our results indicate that a strong adsorption effect occurs which explains phenomena occuring during OMVPE growth of AlxGa1-xAs, such as long A1 transients, oxygen gettering, a... | Organometallic vapor phase epitaxy; Thermodynamics; Graphite; Trimethylaluminum | 1982 |