Fabrication of localized plasma gold-tip nanoprobes with integrated microchannels for direct-write nanomanufacturing

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Publication Type pre-print
School or College College of Engineering
Department Electrical & Computer Engineering
Creator Mastrangelo, Carlos H.
Other Author Xie, Yan; Surapaneni, Rajesh; Chowdhury, Faisal K.; Tabib-Azar, Massood
Title Fabrication of localized plasma gold-tip nanoprobes with integrated microchannels for direct-write nanomanufacturing
Date 2012-01-01
Description We present the microfabrication and characterization of an AFM-tip like device with integrated gas delivery microchannel for the generation of localized microplasmas. The device plasma is generated within a submicron region around its tip for direct-write micro and nanofabrication. The device is fabricated by forming a tall, sharp micromolded gold tip in a KOH etched inverted pyramid followed by thermo-compression bonding and consecutive tip transfer, microfluidic channel patterning and formation of supporting cantilever beam. The tall tip overcomes the height problems of previous designs. Preliminary experiments have been carried out demonstrating the generation of localized microplasma at atmospheric conditions with 1,000V AC stimulation. By mounting the device to a commercialized AFM station and operated in tapping mode, imaging with the same device has also been demonstrated.
Type Text
Publisher Institute of Electrical and Electronics Engineers (IEEE)
Language eng
Bibliographic Citation Xie, Y., Surapaneni, R., Chowdhury, F. K., Tabib-Azar, M., & Mastrangelo, C. H. (2012). Fabrication of localized plasma gold-tip nanoprobes with integrated microchannels for direct-write nanomanufacturing. Proceedings of IEEE Sensors, no. 6411396.
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Format Medium application/pdf
Format Extent 1,531,376 bytes
Identifier uspace,18199
ARK ark:/87278/s6mw31z5
Setname ir_uspace
Date Created 2013-03-05
Date Modified 2021-05-06
ID 708331
Reference URL https://collections.lib.utah.edu/ark:/87278/s6mw31z5
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