Scanning capacitance microscopy on a 25 nm scale

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Publication Type Journal Article
School or College College of Science
Department Physics
Creator Williams, Clayton C.
Other Author Hough, W. P.; Rishton, S. A.
Title Scanning capacitance microscopy on a 25 nm scale
Date 1989
Description A near-field capacitance microscope has been demonstrated on a 25 nm scale. A resonant circuit provides the means for sensing the capacitance variations between a sub-lGO-nra tip and surface with a sensitivity of 1X 10 19 F in a I kHz bandwidth. Feedback control is used to scan the tip at constant gap across a sample, providing a means of noncontact surface profiling. Images of conducting and nonconducting structures are presented.
Type Text
Publisher American Institute of Physics (AIP)
Journal Title Applied Physics Letters
Volume 55
Issue 2
First Page 203
Last Page 205
DOI 10.1063/1.102096
citatation_issn 36951
Subject Scanning capacitance microscopy
Subject LCSH Scanning electron microscopy
Language eng
Bibliographic Citation Williams, C. C., Hough, W. P., & Rishton, S. A. (1989). Scanning capacitance microscopy on a 25 nm scale. Applied Physics Letters, 55(2), July, 203-5.
Rights Management (c)American Institute of Physics. The following article appeared in Williams, C. C., Hough, W. P., & Rishton, S. A., Applied Physics Letters, 55(2), 1989 and may be found at http://dx.doi.org/10.1063/1.102096
Format Medium application/pdf
Format Extent 653,385 bytes
Identifier ir-main,8583
ARK ark:/87278/s6sj2411
Setname ir_uspace
Date Created 2012-06-13
Date Modified 2021-05-06
ID 705297
Reference URL https://collections.lib.utah.edu/ark:/87278/s6sj2411
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