Mapping of mobile charges on insulator surfaces with the electrostatic force microscope

Update Item Information
Publication Type Journal Article
School or College College of Science
Department Physics
Creator Williams, Clayton C.
Other Author Domansky, K.; Leng, Y.; Janata, J.; Petelenz, D.
Title Mapping of mobile charges on insulator surfaces with the electrostatic force microscope
Date 1993
Description Migration of surface ions in lateral fields on insulator surfaces may modify the electrical characteristics of underlying semiconductor structures causing device instabilities. A high sensitivity electrostatic force microscope is used to image the movement and spatial distribution of surface ions on Si3N4. Mobile surface ions are distributed by the fringing fields of a p-n junction and an open-gate field-effect transistor. The surface charge distribution and topography are imaged simultaneously on a micrometer scale.
Type Text
Publisher American Institute of Physics (AIP)
Journal Title Applied Physics Letters
Volume 63
Issue 11
First Page 1513
Last Page 1515
DOI 10.1063/1.110759
citatation_issn 36951
Subject Insulator surfaces; Surface ions; Electrostatic force microscope
Subject LCSH Metal-insulator transitions; Field-effect transistors
Language eng
Bibliographic Citation Domansky, K., Leng, Y., Williams, C. C., Janata, J., & Petelenz, D. (1993). Mapping of mobile charges on insulator surfaces with the electrostatic force microscope. Applied Physics Letters, 63(11), Sept., 1513-5.
Rights Management (c)American Institute of Physics. The following article appeared in Domansky, K., Leng, Y., Williams, C. C., Janata, J., & Petelenz, D., Applied Physics Letters, 63(11), 1993 and may be found at http://dx.doi.org/10.1063/1.110759
Format Medium application/pdf
Format Extent 476,290 bytes
Identifier ir-main,8577
ARK ark:/87278/s6sb4q1r
Setname ir_uspace
ID 703978
Reference URL https://collections.lib.utah.edu/ark:/87278/s6sb4q1r
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