Confining P diffusion in Si by an As-doped barrier layer

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Publication Type Journal Article
School or College College of Engineering
Department Materials Science & Engineering
Creator Liu, Feng
Other Author Bai, Lugang; Yu, Decai; Lu, Guang-Hong; Wang, Q.; Yilmaz, Hamza
Title Confining P diffusion in Si by an As-doped barrier layer
Date 2007
Description The miniaturization of Si-based devices requires control of doping profile, which makes the understanding of dopant interaction and diffusion in Si critical. The authors have studied the effect of As doping on P diffusion in Si using first-principles calculations. The authors found a form of As-vacancy complex is energetically favorable, allowing As to consume the vacancy so as to prohibit the vacancy-mediated P diffusion. Also, in the vicinity of As, the vacancy-mediated P diffusion barrier is increased, decreasing further the P mobility. The results provide useful guidance for designing As-doped barriers to block P diffusion in Si wafer processing and metal oxide semiconductor field-effect transistor device fabrication.
Type Text
Publisher American Institute of Physics (AIP)
Journal Title Applied Physics Letters
Volume 91
Issue 6
First Page 61926
DOI 10.1063/1.2769392
citatation_issn 36951
Subject P diffusion; Silicon; Arsenic doping; As-doped barrier; Diffusion control
Subject LCSH Semiconductor doping
Language eng
Bibliographic Citation Bai, L., Yu, D., Lu, G.-H., Liu, F., Wang, Q., & Yilmaz, H. (2007). Confining P diffusion in Si by an As-doped barrier layer. Applied Physics Letters, 91(6), 061926.
Rights Management (c)American Institute of Physics. The following article appeared in Bai, L., Yu, D., Lu, G.-H., Liu, F., Wang, Q., & Yilmaz, H., Applied Physics Letters, 91(6), 2007 and may be found at http://dx.doi.org/10.1063/1.2769392
Format Medium application/pdf
Format Extent 302,651 bytes
Identifier ir-main,12127
ARK ark:/87278/s60c5cwd
Setname ir_uspace
Date Created 2012-06-13
Date Modified 2021-05-06
ID 702932
Reference URL https://collections.lib.utah.edu/ark:/87278/s60c5cwd
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