| Publication Type |
Journal Article |
| School or College |
College of Science |
| Department |
Physics |
| Creator |
Williams, Clayton C. |
| Other Author |
Wickramasinghe, H. K. |
| Title |
Scanning thermal profiler |
| Date |
1986 |
| Description |
A new high-resolution profilometer has been demonstrated based upon a noncontacting nearfield thermal probe. The thermal probe consists of a thermocouple sensor with dimensions approaching 100 nm. Profiling is achieved by scanning the heated sensor above but close to the surface of a solid. The conduction of heat between tip and sample via the air provides a means for maintaining the sample spacing constant during the lateral scan. The large difference in thermal properties between air and solids makes the profiling technique essentially independent of the material properties of the solid. Noncontact profiling of resist and metal films has shown a lateral resolution of 100 nm and a depth solution of 3 nm. The basic theory of the new probe is described and the results presented. |
| Type |
Text |
| Publisher |
American Institute of Physics (AIP) |
| Journal Title |
Applied Physics Letters |
| Volume |
49 |
| Issue |
23 |
| First Page |
1587 |
| Last Page |
1589 |
| DOI |
10.1063/1.97288 |
| citatation_issn |
36951 |
| Subject |
Thermal probe; Scanning thermal profiler |
| Subject LCSH |
Van der Waals forces; Profilometer |
| Language |
eng |
| Bibliographic Citation |
Williams, C.C., & Wickramasinghe, H. K. (1986). Scanning thermal profiler. Applied Physics Letters, 49(23), Dec., 1587-9. |
| Rights Management |
(c)American Institute of Physics. The following article appeared in Williams, C.C., & Wickramasinghe, H. K., Applied Physics Letters, 49(23), 1986 and may be found at http://dx.doi.org/10.1063/1.97288 |
| Format Medium |
application/pdf |
| Format Extent |
250,924 bytes |
| Identifier |
ir-main,8587 |
| ARK |
ark:/87278/s6w38dd0 |
| Setname |
ir_uspace |
| ID |
702459 |
| Reference URL |
https://collections.lib.utah.edu/ark:/87278/s6w38dd0 |
