Tertiarybutyldimethylantimony: a new Sb source for low temperature organometallic vapor phase epitaxial growth of InSb

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Publication Type Journal Article
School or College College of Engineering
Department Electrical & Computer Engineering; Materials Science & Engineering
Creator Stringfellow, Gerald B.
Other Author Chen, C.H.; Gordon, D.C.; Brown, D.W.; Vaartstra, B.A.
Title Tertiarybutyldimethylantimony: a new Sb source for low temperature organometallic vapor phase epitaxial growth of InSb
Date 1992
Description This article investigates tertiarybutyldimethylantimony as a source for low-temperature organometallic vapor phase epitaxial growth of indium antimonide (InSB); extraction of good surface morphology InSb layers; efficiency of InSB growth; and, presence of a negligible parasitic reaction between trimethylindium and trimethylantimony.
Type Text
Publisher American Institute of Physics (AIP)
Volume 61
Issue 2
Subject Tertiarybutyldimethylantimony; Indium antimonide crystals
Subject LCSH Epitaxy; Metal organic chemical vapor deposition
Language eng
Bibliographic Citation Chen, C.H., Stringfellow, G.B., Gordon, D.C., Brown, D.W., & Vaartstra, B.A. ( 1992). "Tertiarybutyldimethylantimony: A New Sb source for low temperature organometallic vapor phase epitaxial growth of InSb." Applied Physics Letters, 61(2), 204.
Rights Management (c)American Institute of Physics. The following article appeared in Chen, C.H., Stringfellow, G.B., Gordon, D.C., Brown, D.W., & Vaartstra, B.A., Applied Physics Letters, 61(2), 1992
Format Medium application/pdf
Identifier ir-main,11789
ARK ark:/87278/s65q5d5d
Setname ir_uspace
ID 702420
Reference URL https://collections.lib.utah.edu/ark:/87278/s65q5d5d
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