| Publication Type |
journal article |
| School or College |
College of Engineering |
| Department |
Materials Science & Engineering |
| Creator |
Tiwari, Ashutosh |
| Other Author |
Wang, H.; Kvit, A.; Zhang, X.; Narayan, J. |
| Title |
Epitaxial growth of TaN films on Si(100) and Si(111) using a TiN buffer layer |
| Date |
2002 |
| Description |
We have deposited high-quality epitaxial B1 NaCl-structured TaN films on Si(100) and Si(111) substrates with TiN as the buffer layer, using pulsed laser deposition. Our method exploits the concept of lattice-matching epitaxy between TiN and TaN and domain-matching epitaxy between TiN and silicon. X-ray diffraction, transmission electron microscopy, and scanning transmission electron microscopy (Z-contrast) experiments confirmed the single-crystalline nature of the films with cube-on-cube epitaxy. The stoichiometry of the TaN films was determined to be nitrogen deficient (TaN0.9560.05) by Rutherford backscattering. Resistivity of the TaN films was found to be ~220 μΩ cm at room temperature with a temperature coefficient of resistivity of -0.5 μΩ K21. |
| Type |
Text |
| Publisher |
American Institute of Physics (AIP) |
| Volume |
80 |
| Issue |
13 |
| First Page |
2323 |
| Last Page |
2325 |
| DOI |
10.1063/1.146652 |
| Subject |
Diffusion barriers; Buffer layers; Tantalum nitride; Silicon substrate |
| Subject LCSH |
Diffusion coatings; Titanium nitride; Tantalum films; Thin films; Epitaxy |
| Language |
eng |
| Bibliographic Citation |
Wang, H., Tiwari, A., Kvit, A., Zhang, X., & Narayan, J. (2002). Epitaxial growth of TaN films on Si(100) and Si(111) using a TiN buffer layer. Applied Physics Letters, 80(13), 2323-5. |
| Rights Management |
©American Institute of Physics. The following article appeared in Wang, H., Tiwari, A., Kvit, A., Zhang, X., & Narayan, J., Applied Physics Letters, 80 |
| Format Medium |
application/pdf |
| Format Extent |
319,692 bytes |
| Identifier |
ir-main,12094 |
| ARK |
ark:/87278/s6cz3r8d |
| Setname |
ir_uspace |
| ID |
702486 |
| Reference URL |
https://collections.lib.utah.edu/ark:/87278/s6cz3r8d |
