Shear force microscopy with capacitance detection for near-field scanning optical microscopy

Shear force microscopy is very useful for distance regulation in near-field scanning optical microscopy (NSOM). However, the optical method used to detect the shear force can cause problems when imaging photosensitive materials, i.e., the shear force detection beam can optically pump the sample. We present here a new approach to shear force detection based upon capacitance sensing. The design, operation, and performance of the capacitance detection are presented. Shear force topographic images of hard and soft surfaces are shown using tungsten and NSOM fiber tips. The closed loop vertical sensitivity achieved is 0.01 nm//Hz.