| Publication Type |
Journal Article |
| School or College |
College of Science |
| Department |
Physics |
| Creator |
Williams, Clayton C. |
| Other Author |
Martin, Y.; Wickramasinghe, H. K. |
| Title |
Atomic force microscope-force mapping and profiling on a sub 100-Å scale |
| Date |
1987 |
| Description |
A modified version of the atomic force microscope is introduced that enables a precise measurement of the force between a tip and a sample over a tip-sample distance range of 30-150Å. As an application, the force signal is used to maintain the tip-sample spacing constant, so that profiling can be achieved with a spatial resolution of 50Å. A second scheme allows the simultaneous measurement of force and surface profile; this scheme has been used to obtain material-dependent information from surfaces of electronic materials. |
| Type |
Text |
| Publisher |
American Institute of Physics (AIP) |
| Journal Title |
Journal of Applied Physics |
| Volume |
61 |
| Issue |
10 |
| First Page |
4723 |
| Last Page |
4729 |
| DOI |
10.1063/1.338807 |
| citatation_issn |
218979 |
| Subject |
Attractive force; Silicon wafer |
| Subject LCSH |
Van der Waals forces; Atomic force microscopy; Semiconductor wafers; Silicon -- Surfaces |
| Language |
eng |
| Bibliographic Citation |
Martin, Y., Williams, C. C., & Wickramasinghe, H. K. (1987). Atomic force microscope-force mapping and profiling on a sub 100-Å scale. Journal of Applied Physics, 61(10), May, 4723-9. |
| Rights Management |
(c)American Institute of Physics. The following article appeared in Martin, Y., Williams, C. C., & Wickramasinghe, H. K., Journal of Applied Physics, 61(10), 1987 and may be found at http://dx.doi.org/10.1063/1.338807 |
| Format Medium |
application/pdf |
| Format Extent |
1,336,513 |
| Identifier |
ir-main,8586 |
| ARK |
ark:/87278/s6ms4bcm |
| Setname |
ir_uspace |
| ID |
706659 |
| Reference URL |
https://collections.lib.utah.edu/ark:/87278/s6ms4bcm |
