High resolution thermal microscopy

A new high resolution thermal microscope has been demonstrated capable of imaging thermal fields with sub 1000 angstom resolution. It is based upon a non-contacting near field thermal probe. The thermal probe consists of a thermocouple sensor on the end of a tip with sub 1000 angstrom dimensions. The probe tip is scanned in close proximity to a solid or liquid surface and the local temperature is mapped with a resolution determined by the size of the tip. Material independent surface profiling has also been demonstrated with the thermal probe, providing a lateral resolution of approximately 300 angstroms. Temperature mapping and surface profiling results are presented on both electronic and biological materials.