Optical modulation spectroscopy of a-Si:H based multilayer structures

Steady state optical modulation spectrum of a-Si:H/a-SiNx:H multilayer structure, its temperature dependence and time decay have been studied. For multilayers with very thin sublayers the onset of the spectrum is more gradual and occurs at higher energy than the spectrum for unlayered a-Si:H, indicating a broadening of the band tail. For larger layer thicknesses the optical modulation spectrum is compared to that for P-doped a-Si:H and interpreted as due to charged dangling bonds at the interfaces.