Dissociative charge transfer reactions of Ar+, Ne+, and He+ with CF4 from thermal to 50 eV

Guided ion-beam techniques are used to measure the cross sections for reaction of CF4 with Ar+, Ne+, and H e + from thermal to 50 eV. Dissociative charge transfer followed by successive loss of F atoms are the major processes observed. Only CFx+ (x = 1,2,3) products are observed in the reactions of Ar+ and Ne+. With He+, in addition to the CFx+ products, both C+ and F+ are seen at kinetic energies. Reaction rates for these reactions are also given and compared with previous measurements. It is found that the energy dependence of the cross sections can be understood by considering the energies needed to access specific electronic states of the CF4+ ion.