| Publication Type |
Journal Article |
| School or College |
College of Engineering |
| Department |
Electrical & Computer Engineering |
| Creator |
Stringfellow, Gerald B. |
| Other Author |
Kisker, D. W. ; Stevenson, D. A.; Miller, J. N. |
| Title |
Vapor phase interaction of trimethylaluminum with graphite during OMVPE |
| Date |
1982 |
| Description |
We have used a molecular beam mass spectrometer to study the interaction of trimethylaluminum (TMA) with graphite surfaces. Our results indicate that a strong adsorption effect occurs which explains phenomena occuring during OMVPE growth of AlxGa1-xAs, such as long A1 transients, oxygen gettering, and reduced incorporation of selenium. |
| Type |
Text |
| Publisher |
EDP Sciences |
| First Page |
221 |
| Last Page |
227 |
| Subject |
Organometallic vapor phase epitaxy; Thermodynamics; Graphite; Trimethylaluminum |
| Subject LCSH |
Crystal growth; Epitaxy; Mass spectrometry |
| Language |
eng |
| Bibliographic Citation |
Kisker, D. W., Stevenson, D. A., Miller, J. N., & Stringfellow, G. B. (1982). Vapor phase interaction of trimethylaluminum with graphite during OMVPE. Journal de Physique Colloque, C5, 43, 221-7. |
| Rights Management |
(c)EDP Sciences http://publications.edpsciences.org/ |
| Format Medium |
application/pdf |
| Format Extent |
2,908,404 bytes |
| Identifier |
ir-main,2401 |
| ARK |
ark:/87278/s6jm2tw1 |
| Setname |
ir_uspace |
| ID |
704032 |
| Reference URL |
https://collections.lib.utah.edu/ark:/87278/s6jm2tw1 |
