| Publication Type |
Journal Article |
| School or College |
College of Engineering |
| Department |
Electrical & Computer Engineering |
| Creator |
Mastrangelo, Carlos H. |
| Other Author |
Chalasani, S.; Xie, Y. |
| Title |
Batch fabrication of flowable colorimetric pressure sensing particles via surface micromachining |
| Date |
2010 |
| Description |
The batch fabrication and test of artificial optical resonator slab-type micro particles (14 μm diameter, 0.7 μm gap) is presented as a means to map absolute pressure within microscopic environments. The pressure-sensing particles consist of a semi-transparent elastic polysilicon shell enclosing a reference vacuum cavity. The optical resonance frequency and the corresponding external pressure can hence be interrogated optically via reflectivity measurements. We demonstrate the measurement of internal pressures between 0-20 psi within microfluidic environments. |
| Type |
Text |
| Publisher |
Institute of Electrical and Electronics Engineers (IEEE) |
| First Page |
135 |
| Last Page |
136 |
| Language |
eng |
| Bibliographic Citation |
Chalasani, S., Xie, Y., & Mastrangelo, C. H. (2010). Batch fabrication of flowable colorimetric pressure sensing particles via surface micromachining. IEEE Optical MEMS & Nanophotonics Conference, 135-6. Aug 9-12. |
| Rights Management |
(c) 2010 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. |
| Format Medium |
application/pdf |
| Format Extent |
1,1995,138 bytes |
| Identifier |
ir-main,15608 |
| ARK |
ark:/87278/s6gt65mj |
| Setname |
ir_uspace |
| ID |
705166 |
| Reference URL |
https://collections.lib.utah.edu/ark:/87278/s6gt65mj |
