Publication Type |
Journal Article |
School or College |
College of Engineering |
Department |
Electrical & Computer Engineering; Materials Science & Engineering |
Creator |
Stringfellow, Gerald B.; Cohen, Richard M. |
Other Author |
Kuo, C.P.; Yuan, Y.S.; Dunn, J. |
Title |
Organometallic vapor phase epitaxial growth of high purity GaInAs using trimethylindium |
Date |
1984-03-01 |
Description |
Gax In1−xAs lattice matched to the InP substrate (x=0.47) has been grown by organometallic vapor phase epitaxy using trimethylindium (TMIn) and trimethylgallium (TMGa) as the group III sources and AsH3 as the As source. In a simple, horizontal, atmospheric pressure reactor, the GaInAs growth proceeds without visible evidence of parasitic prereaction problems. The process yields homogeneous, reproducible GaInAs with a high growth efficiency and a solid/vapor In distribution coefficient of nearly unity. Most importantly, several layers with room-temperature electron mobilities of approximately 10 000 cm2/Vs and carrier concentrations of approximately 1015 cm−3 have been produced. The 4-K photoluminescence shows a narrow (4-5 meV) band-edge emission peak and a low-intensity band acceptor peak at ~18 meV lower energy. Surface morphologies are routinely featureless as observed by high magnification interference contrast microscopy. |
Type |
Text |
Publisher |
American Institute of Physics (AIP) |
Volume |
44 |
Issue |
5 |
First Page |
550 |
Last Page |
552 |
Subject |
Electron mobilities; Photouminescience; Fabricate modulation |
Subject LCSH |
Epitaxy; Metal organic chemical vapor deposition |
Language |
eng |
Bibliographic Citation |
Kuo, C.P., Yuan, Y.S., Cohen, R.M., Dunn, J., & Stringfellow, G.B. ( 1984). Organometallic vapor phase epitaxial growth of high purity GaInAs using trimethylindium. Applied Physics Letters, 44(5), 550-52. |
Rights Management |
(c)American Institute of Physics. The following article appeared in Kuo, C.P., Yuan, Y.S., Cohen, R.M., Dunn, J., & Stringfellow, G.B., Applied Physics Letters, 44(5), 1984 |
Format Medium |
application/pdf |
Format Extent |
255,554 bytes |
Identifier |
ir-main,1943 |
ARK |
ark:/87278/s6st87d7 |
Setname |
ir_uspace |
ID |
706766 |
Reference URL |
https://collections.lib.utah.edu/ark:/87278/s6st87d7 |