Design and simulation of contour mode MEMS resonator on Si for power converters

Microelectromechanical systems (MEMS) resonators on Si have the potential to replace the discrete passive components in a power converter. These devices not only can reduce the size and weight of the converter but also can facilitate the implementation of power converter on a chip. In this paper, a contour mode MEMS resonator has been presented that can achieve resonant frequency in the range of several MHz, and the operating principles of the device have been discussed in detail. This device was simulated in COMSOL Multiphysics, and a resonant converter has been simulated in PSIM to harvest energy from a thermo electric generator. The equivalent electrical model of the MEMS resonator was incorporated into that circuit validating the feasibility of using MEMS resonator in power conversion systems. Detailed fabrication process of the device has been presented and implemented at University of Utah's Nanofab. Initial experimental characteristics of the resonator have been included in the paper.