Thermodynamic aspects of organometallic VPE

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Publication Type Journal Article
School or College College of Engineering
Department Electrical & Computer Engineering
Creator Stringfellow, Gerald B.
Title Thermodynamic aspects of organometallic VPE
Date 1982
Description Organometallic vapor phase epitaxy (OMVPE) is a new crystal growth technique which is rapidly gaining popularity due to its simplicity, flexibility and proven ability to grow excellent quality III/V compounds and alloys for device applications.
Type Text
Publisher EDP Sciences
Subject Organometallic vapor phase epitaxy; Thermodynamics
Subject LCSH Crystal growth; Epitaxy
Language eng
Bibliographic Citation Stringfellow, G. B. (1982). Thermodynamic aspects of organometallic VPE. Journal de Physique Colloque, C5, 43, 17.
Rights Management ©EDP Sciences http://publications.edpsciences.org/
Format Medium application/pdf
Format Extent 411,649 bytes
Identifier ir-main,2372
ARK ark:/87278/s6nk3zft
Setname ir_uspace
ID 705328
Reference URL https://collections.lib.utah.edu/ark:/87278/s6nk3zft
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