Publication Type |
Journal Article |
School or College |
College of Engineering |
Department |
Electrical & Computer Engineering; Materials Science & Engineering |
Creator |
Stringfellow, Gerald B. |
Other Author |
Chen, C.H.; Gordon, D.C.; Brown, D.W.; Vaartstra, B.A. |
Title |
Tertiarybutyldimethylantimony: a new Sb source for low temperature organometallic vapor phase epitaxial growth of InSb |
Date |
1992 |
Description |
This article investigates tertiarybutyldimethylantimony as a source for low-temperature organometallic vapor phase epitaxial growth of indium antimonide (InSB); extraction of good surface morphology InSb layers; efficiency of InSB growth; and, presence of a negligible parasitic reaction between trimethylindium and trimethylantimony. |
Type |
Text |
Publisher |
American Institute of Physics (AIP) |
Volume |
61 |
Issue |
2 |
Subject |
Tertiarybutyldimethylantimony; Indium antimonide crystals |
Subject LCSH |
Epitaxy; Metal organic chemical vapor deposition |
Language |
eng |
Bibliographic Citation |
Chen, C.H., Stringfellow, G.B., Gordon, D.C., Brown, D.W., & Vaartstra, B.A. ( 1992). "Tertiarybutyldimethylantimony: A New Sb source for low temperature organometallic vapor phase epitaxial growth of InSb." Applied Physics Letters, 61(2), 204. |
Rights Management |
(c)American Institute of Physics. The following article appeared in Chen, C.H., Stringfellow, G.B., Gordon, D.C., Brown, D.W., & Vaartstra, B.A., Applied Physics Letters, 61(2), 1992 |
Format Medium |
application/pdf |
Identifier |
ir-main,11789 |
ARK |
ark:/87278/s65q5d5d |
Setname |
ir_uspace |
ID |
702420 |
Reference URL |
https://collections.lib.utah.edu/ark:/87278/s65q5d5d |