Publication Type |
pre-print |
School or College |
College of Engineering |
Department |
Electrical & Computer Engineering |
Creator |
Mastrangelo, Carlos H. |
Other Author |
Xie, Yan; Hsieh, Hao-Chieh; Pai, Pradeep; Kim, Hanseup; Tabib-Azar, Massood |
Title |
Precision curved micro hemispherical resonator shells fabricated by poached-egg micro-molding |
Date |
2012-01-01 |
Description |
This paper presents a new technique for the fabrication of high resolution non-planar precision microshells for hemispherical resonating gyros via a poached-egg micromolding (PEM) method. In PEM, precision ball lenses are used as starting molds. Hemispherical shells are formed on the lenses using five major steps: (1) isotropic coating with sacrificial and shell layers, (2) stencil transfer of coated lenses to substrate, (3) shell top removal by anisotropic etching, (4) sacrificial layer etching and (5) release of the ball lens molds. Using PEM, we fabricated posted sputtered ultra-low-expansion glass hemispherical shells of 1 mm diameter and 1.2 μm thickness. The microshells have better than 120 ppm uniformity in thickness and less than ±0.125 μm deviation from a perfect sphere. The measured microshell resonant frequency at 100 mTorr was 17.32 kHz and the Q was ~ 20,000. |
Type |
Text |
Publisher |
Institute of Electrical and Electronics Engineers (IEEE) |
Language |
eng |
Bibliographic Citation |
Xie, Y., Hsieh, H.-C., Pai, P., Kim, H., Tabib-Azar, M., & Mastrangelo, C. H. (2010). Precision curved micro hemispherical resonator shells fabricated by poached-egg micro-molding. Proceedings of IEEE Sensors, no. 6411085. |
Rights Management |
(c)2012 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. |
Format Medium |
application/pdf |
Format Extent |
1,416,924 bytes |
Identifier |
uspace,18200 |
ARK |
ark:/87278/s6vd7h7d |
Setname |
ir_uspace |
ID |
708337 |
Reference URL |
https://collections.lib.utah.edu/ark:/87278/s6vd7h7d |