Publication Type |
Journal Article |
School or College |
College of Engineering |
Department |
Electrical & Computer Engineering |
Creator |
Mastrangelo, Carlos H.; Tabib-Azar, Massood |
Other Author |
Xie, Yan; Yaun, Wen |
Title |
Microfabrication of plasma nanotorch tips for localized etching and deposition |
Date |
2010 |
Description |
Abstract-We present the microfabrication and initial testing of an AFM-tip like device, or nanotorch, that is capable of generating a very localized microplasma at its tip. The submicron region near its tip provides a unique manufacturing environment where new methods for controlled direct-write micro and nanofabrication can be tested. The device has been fabricated using both surface and bulk micromaching techniques. We demonstrated both localized submicrometer oxidazion patterning and imaging with the same device. Preliminary experiments have also been carried out demonstrating localized plasma etching of a polymer surface at atmospheric conditions with an AC voltage of 1000V. |
Type |
Text |
Publisher |
Institute of Electrical and Electronics Engineers (IEEE) |
First Page |
2243 |
Last Page |
2246 |
Language |
eng |
Bibliographic Citation |
Xie, Y., Yaun, W., Tabib-Azar, M., & Mastrangelo, C. H. (2010). Microfabrication of plasma nanotorch tips for localized etching and deposition. IEEE Sensors Confrerence, 2243-6. November. |
Rights Management |
(c) 2010 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. |
Format Medium |
application/pdf |
Format Extent |
2,187,891 bytes |
Identifier |
ir-main,15613 |
ARK |
ark:/87278/s6mk6xk1 |
Setname |
ir_uspace |
ID |
707281 |
Reference URL |
https://collections.lib.utah.edu/ark:/87278/s6mk6xk1 |