Publication Type |
Journal Article |
School or College |
College of Engineering |
Department |
Materials Science & Engineering |
Creator |
Tiwari, Ashutosh |
Other Author |
Wang, H.; Zhang, X.; Gupta, A.; Narayan, J. |
Title |
Growth and characterization of TaN/TiN superlattice structures |
Date |
2003 |
Description |
Epitaxial B1 NaCl-structured TaN(3 nm)/TiN(2 nm) superlattice structures were grown on Si(100) substrates with a TiN buffer layer, using pulsed-laser deposition. A special target assembly was used to manipulate the thickness of each layer. X-ray diffraction, transmission electron microscopy, and scanning transmission electron microscopy (Z contrast! studies confirmed the single-crystalline nature of the superlattice with a uniform layer structure. Nanoindentation results suggest the high hardness of these superlattice structures. Four-point-probe resistivity measurements show low resistivity of the heterostructures and a Cu diffusion characteristic study proved this superlattice system can be a promising diffusion barrier and can withstand 700 °C annealing for 30 min. |
Type |
Text |
Publisher |
American Institute of Physics (AIP) |
Journal Title |
Applied Physics Letters |
Volume |
83 |
Issue |
15 |
First Page |
3072 |
Last Page |
3074 |
DOI |
10.1063/1.1616656 |
citatation_issn |
36951 |
Subject |
Diffusion barriers; Copper diffusion; Tantalum nitride |
Subject LCSH |
Superlattices as materials; Titanium nitride; Tantalum films; Thin films; Diffusion coatings |
Language |
eng |
Bibliographic Citation |
Wang, H., Zhang, X., Gupta, A., Tiwari, A., & Narayan, J. (2003). Growth and characterization of TaN/TiN superlattice structures. Applied Physics Letters, 83(15), 3072-4. |
Rights Management |
(c)American Institute of Physics. The following article appeared in Wang, H., Zhang, X., Gupta, A., Tiwari, A., & Narayan, J., Applied Physics Letters, 83(15), 2003 and may be found at http://dx.doi.org/10.1063/1.1616656 |
Format Medium |
application/pdf |
Format Extent |
457,344 bytes |
Identifier |
ir-main,12082 |
ARK |
ark:/87278/s6z616gd |
Setname |
ir_uspace |
ID |
705289 |
Reference URL |
https://collections.lib.utah.edu/ark:/87278/s6z616gd |