| Publication Type |
Journal Article |
| School or College |
College of Science |
| Department |
Physics |
| Creator |
Williams, Clayton C. |
| Other Author |
Mang, K. M.; Khang, Y.; Park, Y. J.; Kuk, Young; Lee, S. M. |
| Title |
Direct imaging of SiO2 thickness variation on Si using modified atomic force microscope |
| Date |
1996-03-01 |
| Description |
Fabrication techniques of metal-oxide-semiconductor ~(MOS) transistors have been improved very rapidly during the last several decades. With this trend, scaling down of MOS transistors is necessary to improve the speed of circuits and the packing density of discrete devices. Both lateral and vertical dimensions of unit devices are reduced to ascertain better electrical characteristics of devices. |
| Type |
Text |
| Publisher |
American Institute of Physics (AIP) |
| Journal Title |
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures |
| Volume |
14 |
| Issue |
2 |
| First Page |
1536 |
| Last Page |
1539 |
| DOI |
10.1116/1.589134 |
| citatation_issn |
0734211X |
| Subject |
Silicon dioxide; Oxide layer; Phosphorus ions; Oxide capacitance; Dopant profile |
| Subject LCSH |
Silica; Semiconductor doping; Metal oxide semiconductor field-effect transistors; Metal oxide semiconductors; Metal-insulator transitions |
| Language |
eng |
| Bibliographic Citation |
Mang, K. M., Khang, Y., Park, Y. J., Kuk, Y., Lee, S. M., & Williams, C. C. (1996). Direct imaging of SiO2 thickness variation on Si using modified atomic force microscope. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 14(2), 1536-9. |
| Rights Management |
(c)American Institute of Physics. The following article appeared in Mang, K. M., Khang, Y., Park, Y. J., Kuk, Y., Lee, S. M., & Williams, C. C., Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 14(2), 1996 and may be found at http://dx.doi.org/10.1116/1.589134 |
| Format Medium |
application/pdf |
| Format Extent |
203,689 bytes |
| Identifier |
ir-main,8570 |
| ARK |
ark:/87278/s6tm7vnp |
| Setname |
ir_uspace |
| ID |
706231 |
| Reference URL |
https://collections.lib.utah.edu/ark:/87278/s6tm7vnp |
