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Show An Investigation of Aromatic Derivatives Removal By Regenerative Combustion Chang Rey-Chein, Chen Wen-Chieh and Chang Wen-Chen Energy & Resources Laboratories, Industrial Technology Research Institute Bldg.64, 195 Chung Hsing Rd., Section 4, Chutung, Hsinchu Taiwan 310 Fax:+886-3-5820230 E-mail: f760924@erl.itri.org.tw Abstract Vaporised aromatic derivatives have been found in fast growing microelectronic industrial process, Taiwan EPA has classified them as the major hazardous air pollutants (HAP's) a m o n g VOC's and has recently regulated their emissions. In this presentation, an optimum bed array of honeycomb ceramic regenerator was first investigated and then proceeds design of the rotary regenerative combustion system to test destruction efficiency of VOC's. Under a range of combustion temperature from 650 to 850 °C , the effect of heat recovery on destruction efficiency of aromatic derivatives were further investigated by varying the inlet concentration of process exhaust. The preliminary results show aromatic derivatives are barely destroyed at temperature below 850 °C, but the destruction efficiency strongly depends on a maximized heat recovery of the exhaust gas, i.e., the heat recovery capability of honeycomb ceramic regenerator. Moreover, it seems to fasten destruction rate is subjected to those conditions is able to exhibit a higher heat recovery that inherent to cross the ignition temperature of the process exhaust, more experimental datum are needed to validate this concept and is yet under investigation. Introduction Volatile organic compounds ( VOCs ) are widely used in microelectronics and often present in facility exhaust streams, i.e., the |
