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Theses & Dissertations
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Year
2010
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2010
School Or College
College of Engineering
1
Department
Electrical & Computer Engineering
1
Publication Type
dissertation
1
Subject
High temperature
1
Humidity sensors
1
Microfabrication
1
Y-doped BaZrO3
1
Yttrium doped Barium Zirconate
1
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"ir_etd"
Subject:
"Humidity sensors"
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Fast, selective, and stable high temperature humidity sensors enabled by microfabricated yttrium-doped barium zirconate thin films
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