| Description |
For the past two decades, tip-based thermal engineering has made remarkable advances to realize unprecedented nanoscale thermal applications, such as thermomechanical data storage, thermophysical/chemical property characterization of materials in nanometer scale, and scanning thermal imaging and analysis. All these applications involve localized heating with elevated temperature, generally in the order of mean free paths of heat carriers, thus necessitates fundamental understanding of sub-continuum thermal transport across point constrictions and within thin films. Considering the demands, this dissertation is divided into three main scopes providing: (1) a numerical model that provides insight onto nanoscale thermal transport, (2) an electrothermal characterization of a heated microcantilever as a localized heating source, and (3) qualitative measurement of tip-substrate thermal transport using high resolution nanothermometer/heater. This dissertation starts with a literature review on the three aforementioned scopes followed by a numerical model for two-dimensional transient ballistic-diffusive heat transfer combining finite element analysis with discrete ordinate method (DOM-FEA), seeking to provide insight on subcontinuum thermal transport. The phonon Boltzmann transport equation (BTE) under grey relaxation time approximation is solved for different Knudsen numbers. Next, a thermal microcantilever, as one of the main tools in tip-based thermal engineering, is characterized under periodic heating operation in air and vacuum using 3ï·ï€ technique. A three-dimensional FEA simulation of a thermal microcantilever is used to model heat transfer in frequency domain resulting in good agreement with the experiment. Next, quantitative thermal transport is measured by a home-built nanothermometer fabricated using combination of electron-beam lithography and photolithography. An atomic force microscope (AFM) cantilever is used to scan over the sensing probe of the nanothermometer at an elevated temperature causing local cooling. The experiment is done in air resulting in a tip-substrate effective thermal conductance of 32.5 nW/K followed by theoretical calculations predicting contribution of solid-solid thermal conduction to be 48%. Finally, the same experiment is conducted in vacuum with similar operating condition, showing 50% contribution of solid-solid conductance, which is in good agreement with the theory, assuming no water meniscus in vacuum condition. The outcomes of these studies provide a strong platform to fundamentally understand thermal transport at the micro/nanometer scale. |
