Filters: Subject:"Nanotechnology" Department:"Electrical & Computer Engineering" Collection:"ir_etd" School Or College:"College of Engineering"
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| Title | Author | Subject | Description | Date | ||
|---|---|---|---|---|---|---|
| 1 |  | Super-resolution optical nanopatterning beyond the far-field diffraction limit using photochromic molecules and Absorbance Modulation Optical Lithography | Majumder, Apratim | Nanotechnology; Optics; Electrical engineering | Following the progress of shrinking down the sizes of integrated circuit elements, optical lithography, which is the state of the art of patterning ever-small structures, has now almost reached its final limit. This limit to the size of the smallest feature that can be patterned using photolithograp... | 2018 |
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