Design and simulation of contour mode MEMS resonator on Si for power converters

Update Item Information
Publication Type pre-print
School or College College of Engineering
Department Electrical & Computer Engineering
Creator Khan, Faisal Habib
Other Author Imtiaz, Abusaleh M.
Title Design and simulation of contour mode MEMS resonator on Si for power converters
Date 2013-01-01
Description Microelectromechanical systems (MEMS) resonators on Si have the potential to replace the discrete passive components in a power converter. These devices not only can reduce the size and weight of the converter but also can facilitate the implementation of power converter on a chip. In this paper, a contour mode MEMS resonator has been presented that can achieve resonant frequency in the range of several MHz, and the operating principles of the device have been discussed in detail. This device was simulated in COMSOL Multiphysics, and a resonant converter has been simulated in PSIM to harvest energy from a thermo electric generator. The equivalent electrical model of the MEMS resonator was incorporated into that circuit validating the feasibility of using MEMS resonator in power conversion systems. Detailed fabrication process of the device has been presented and implemented at University of Utah's Nanofab. Initial experimental characteristics of the resonator have been included in the paper.
Type Text
Publisher Institute of Electrical and Electronics Engineers (IEEE)
Language eng
Bibliographic Citation Imtiaz, A. M., & Khan, F. H. (2013). Design and simulation of contour mode MEMS resonator on Si for power converters. 2013 IEEE 14th Workshop on Control and Modeling for Power Electronics, 6626464.
Rights Management (c) 2013 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Format Medium application/pdf
Format Extent 1,410,018 bytes
Identifier uspace,18360
ARK ark:/87278/s6q84p11
Setname ir_uspace
ID 711295
Reference URL https://collections.lib.utah.edu/ark:/87278/s6q84p11
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