Atomic force microscope-force mapping and profiling on a sub 100-Å scale

Update Item Information
Publication Type Journal Article
School or College College of Science
Department Physics
Creator Williams, Clayton C.
Other Author Martin, Y.; Wickramasinghe, H. K.
Title Atomic force microscope-force mapping and profiling on a sub 100-Å scale
Date 1987
Description A modified version of the atomic force microscope is introduced that enables a precise measurement of the force between a tip and a sample over a tip-sample distance range of 30-150Å. As an application, the force signal is used to maintain the tip-sample spacing constant, so that profiling can be achieved with a spatial resolution of 50Å. A second scheme allows the simultaneous measurement of force and surface profile; this scheme has been used to obtain material-dependent information from surfaces of electronic materials.
Type Text
Publisher American Institute of Physics (AIP)
Journal Title Journal of Applied Physics
Volume 61
Issue 10
First Page 4723
Last Page 4729
DOI 10.1063/1.338807
citatation_issn 218979
Subject Attractive force; Silicon wafer
Subject LCSH Van der Waals forces; Atomic force microscopy; Semiconductor wafers; Silicon -- Surfaces
Language eng
Bibliographic Citation Martin, Y., Williams, C. C., & Wickramasinghe, H. K. (1987). Atomic force microscope-force mapping and profiling on a sub 100-Å scale. Journal of Applied Physics, 61(10), May, 4723-9.
Rights Management (c)American Institute of Physics. The following article appeared in Martin, Y., Williams, C. C., & Wickramasinghe, H. K., Journal of Applied Physics, 61(10), 1987 and may be found at http://dx.doi.org/10.1063/1.338807
Format Medium application/pdf
Format Extent 1,336,513
Identifier ir-main,8586
ARK ark:/87278/s6ms4bcm
Setname ir_uspace
ID 706659
Reference URL https://collections.lib.utah.edu/ark:/87278/s6ms4bcm
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