Improved sensitivity in ellipsometry of thin biochemical films by employing sublayers

Update Item Information
Publication Type Journal Article
School or College College of Engineering
Department Bioengineering
Creator Christensen, Douglas A.; Andrade, Joseph D.
Other Author Wang, Jinyu; Lin, Jinnan
Title Improved sensitivity in ellipsometry of thin biochemical films by employing sublayers
Date 1990
Description Ellipsometry is widely used for investigating the optical properties of thin films on planar substrates, including films of adsorbed proteins or polymers. The average thickness and effective refractive index of the adsorbed layer are calculated by measuring the A and ¥ ellipsometry parameters. Unfortunately the thickness of the adsorbed protein layers is often too thin to significantly affect the A and Y parameters. However, using a substructure consisting of an additional sublayer placed between the substrate and the adsorbed layer, we can improve the sensitivities of both A and 4* to changes in the adsorbed layer, provided that the thickness of the sublayer is optimized. We show that for a Si02 layer on a Si wafer, the optimum Si02 thickness is about 1350 A when the incident angle is 70 degrees and the wavelength is 6328 A. The materials of the sublayer can be metal, semiconductor and/or dielectric.
Type Text
Publisher International Society for Optical Engineering (SPIE)
Volume 1324
First Page 72
Last Page 78
DOI 10.1117/12.22418
citatation_issn 0277786X
Subject Biochemical films; SiO2 sublayer
Subject LCSH Ellipsometry; Thin films; Silica
Language eng
Conference Title Modeling of Optical Thin Films II; Thursday 12 July 1990; San Diego, CA, USA
Bibliographic Citation Wang, J., Andrade, J. D., Lin, J., & Christensen, D. A. (1990). Improved sensitivity in ellipsometry of thin biochemical films by employing sublayers. Proceedings of SPIE - The International Society for Optical Engineering, 1324, 72-8.
Rights Management (c)Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. http://dx.doi.org/10.1117/12.22418
Format Medium application/pdf
Format Extent 467,348 bytes
Identifier ir-main,11682
ARK ark:/87278/s6ng5847
Setname ir_uspace
ID 705739
Reference URL https://collections.lib.utah.edu/ark:/87278/s6ng5847
Back to Search Results