Batch fabrication of flowable colorimetric pressure sensing particles via surface micromachining

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Publication Type Journal Article
School or College College of Engineering
Department Electrical & Computer Engineering
Creator Mastrangelo, Carlos H.
Other Author Chalasani, S.; Xie, Y.
Title Batch fabrication of flowable colorimetric pressure sensing particles via surface micromachining
Date 2010
Description The batch fabrication and test of artificial optical resonator slab-type micro particles (14 μm diameter, 0.7 μm gap) is presented as a means to map absolute pressure within microscopic environments. The pressure-sensing particles consist of a semi-transparent elastic polysilicon shell enclosing a reference vacuum cavity. The optical resonance frequency and the corresponding external pressure can hence be interrogated optically via reflectivity measurements. We demonstrate the measurement of internal pressures between 0-20 psi within microfluidic environments.
Type Text
Publisher Institute of Electrical and Electronics Engineers (IEEE)
First Page 135
Last Page 136
Language eng
Bibliographic Citation Chalasani, S., Xie, Y., & Mastrangelo, C. H. (2010). Batch fabrication of flowable colorimetric pressure sensing particles via surface micromachining. IEEE Optical MEMS & Nanophotonics Conference, 135-6. Aug 9-12.
Rights Management (c) 2010 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Format Medium application/pdf
Format Extent 1,1995,138 bytes
Identifier ir-main,15608
ARK ark:/87278/s6gt65mj
Setname ir_uspace
Date Created 2012-06-13
Date Modified 2021-05-06
ID 705166
Reference URL https://collections.lib.utah.edu/ark:/87278/s6gt65mj
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