Silicon carbide enhanced thermomigration

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Publication Type Journal Article
School or College School of Medicine; College of Engineering
Department Mechanical Engineering; Ophthalmology; Electrical & Computer Engineering; Surgery; Bioengineering; Physiology
Creator Normann, Richard A.; Abbasi, Masoud; Johansson,Torbjorn
Title Silicon carbide enhanced thermomigration
Date 1992
Description The widespread acceptance of thermomigration technology to produce through-chip interconnects has been impaired by (i) a random walk of the Si-Al liquid eutectic inclusion as it traverses the wafer, and (ii) a ?surface barrier? which allows thermomigration of only relatively large inclusions. In this paper it is shown that these problems can be mitigated by thermomigrating at high wafer temperatures and with large temperature gradients through the wafer. It has been possible to achieve these high wafer temperatures and large gradients using a bank of infrared lamps and a bilaminar structure of silicon carbide powder compressed onto the top of a silicon wafer. This increases the delivery of energy to the wafer and reduces the random walk of the liquid inclusion. Further, the high wafer temperatures and enhanced temperature gradients created with this bilaminar silicon carbide structure allow relatively small, square aluminum pads (35 pm on a side) to thermomigrate through a l&nil-thick silicon wafer.
Type Text
Publisher American Institute of Physics (AIP)
Volume 72
Issue 5
First Page 1846
Last Page 1851
Subject Silicon Dioxide; Thermometers; Transducers; Thermomigration Technology; Infrared Lamps
Subject MESH Silicon; Temperature; Radiation
Language eng
Bibliographic Citation Abbasi M, Johansson T, Normann RA. (1992). Silicon Carbide Enhanced Thermomigration. J Appl Phys, 72(5), 1846-1851
Rights Management ©American Institute of Physics. The following article appeared in (author, journal. issue, year) and may be found at (URL/link for published article abstract).
Format Medium application/pdf
Identifier ir-main,12726
ARK ark:/87278/s6280rx3
Setname ir_uspace
ID 704853
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